Dixon T. K. Kwok

Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects

Dixon T. K. Kwok, Jianhui Li, Xiaobo Ma, Paul Kim Ho Chu (2010). Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects. , 43(9), DOI: https://doi.org/10.1088/0022-3727/43/9/095203.