0 Datasets
0 Files
Get instant academic access to this publication’s datasets.
Yes. After verification, you can browse and download datasets at no cost. Some premium assets may require author approval.
Files are stored on encrypted storage. Access is restricted to verified users and all downloads are logged.
Yes, message the author after sign-up to request supplementary files or replication code.
Join 50,000+ researchers worldwide. Get instant access to peer-reviewed datasets, advanced analytics, and global collaboration tools.
✓ Immediate verification • ✓ Free institutional access • ✓ Global collaborationJoin our academic network to download verified datasets and collaborate with researchers worldwide.
Get Free AccessA hybrid protocol including particle-in-cell (PIC) ions and Boltzmann electron distribution is developed to simulate plasma immersion ion implantation (PIII) into an S-shaped bar inside a grounded cylindrical cage consisting of a mesh. A multiple-grid system with three cell confinements is adopted to achieve sufficient accuracy and acceptable computational time. The simulation results reveal that the implantation fluence distribution along the major curvature is more uniform than that obtained by conventional PIII.
Dixon T. K. Kwok, Jianhui Li, Xiaobo Ma, Paul Kim Ho Chu (2010). Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects. , 43(9), DOI: https://doi.org/10.1088/0022-3727/43/9/095203.
Datasets shared by verified academics with rich metadata and previews.
Authors choose access levels; downloads are logged for transparency.
Students and faculty get instant access after verification.
Type
Article
Year
2010
Authors
4
Datasets
0
Total Files
0
Language
en
DOI
https://doi.org/10.1088/0022-3727/43/9/095203
Access datasets from 50,000+ researchers worldwide with institutional verification.
Get Free Access