Raw Data Library
About
Aims and ScopeAdvisory Board Members
More
Who We Are?
User Guide
Green Science
​
​
EN
Kurumsal BaşvuruSign inGet started
​
​

About
Aims and ScopeAdvisory Board Members
More
Who We Are?
User GuideGreen Science

Language

Kurumsal Başvuru

Sign inGet started
RDL logo

Verified research datasets. Instant access. Built for collaboration.

Navigation

About

Aims and Scope

Advisory Board Members

More

Who We Are?

Contact

Add Raw Data

User Guide

Legal

Privacy Policy

Terms of Service

Support

Got an issue? Email us directly.

Email: info@rawdatalibrary.netOpen Mail App
​
​

© 2026 Raw Data Library. All rights reserved.
PrivacyTermsContact
  1. Raw Data Library
  2. /
  3. Publications
  4. /
  5. Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects

Verified authors • Institutional access • DOI aware
50,000+ researchers120,000+ datasets90% satisfaction
Article
en
2010

Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects

0 Datasets

0 Files

en
2010
Vol 43 (9)
Vol. 43
DOI: 10.1088/0022-3727/43/9/095203

Get instant academic access to this publication’s datasets.

Create free accountHow it works

Frequently asked questions

Is access really free for academics and students?

Yes. After verification, you can browse and download datasets at no cost. Some premium assets may require author approval.

How is my data protected?

Files are stored on encrypted storage. Access is restricted to verified users and all downloads are logged.

Can I request additional materials?

Yes, message the author after sign-up to request supplementary files or replication code.

Advance your research today

Join 50,000+ researchers worldwide. Get instant access to peer-reviewed datasets, advanced analytics, and global collaboration tools.

Get free academic accessLearn more
✓ Immediate verification • ✓ Free institutional access • ✓ Global collaboration
Access Research Data

Join our academic network to download verified datasets and collaborate with researchers worldwide.

Get Free Access
Institutional SSO
Secure
This PDF is not available in different languages.
No localized PDFs are currently available.
Paul Kim Ho Chu
Paul Kim Ho Chu

Institution not specified

Verified
Dixon T. K. Kwok
Jianhui Li
Xiaobo Ma
+1 more

Abstract

A hybrid protocol including particle-in-cell (PIC) ions and Boltzmann electron distribution is developed to simulate plasma immersion ion implantation (PIII) into an S-shaped bar inside a grounded cylindrical cage consisting of a mesh. A multiple-grid system with three cell confinements is adopted to achieve sufficient accuracy and acceptable computational time. The simulation results reveal that the implantation fluence distribution along the major curvature is more uniform than that obtained by conventional PIII.

How to cite this publication

Dixon T. K. Kwok, Jianhui Li, Xiaobo Ma, Paul Kim Ho Chu (2010). Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects. , 43(9), DOI: https://doi.org/10.1088/0022-3727/43/9/095203.

Related publications

Why join Raw Data Library?

Quality

Datasets shared by verified academics with rich metadata and previews.

Control

Authors choose access levels; downloads are logged for transparency.

Free for Academia

Students and faculty get instant access after verification.

Publication Details

Type

Article

Year

2010

Authors

4

Datasets

0

Total Files

0

Language

en

DOI

https://doi.org/10.1088/0022-3727/43/9/095203

Join Research Community

Access datasets from 50,000+ researchers worldwide with institutional verification.

Get Free Access