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Get Free AccessThis paper reports the characterization of both barrier type and porous type anodic oxide films on aluminium by means of spectroscopic ellipsometry (SE). I
J. De Laet, Jan Vanhellemont, Herman Terryn, J. Vereecken (1992). Characterization of various aluminium oxide layers by means of spectroscopic ellipsometry. Applied Physics A Solids and Surface, 54(1), pp. 72-78, DOI: 10.1007/bf00348134.
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Type
Article
Year
1992
Authors
4
Datasets
0
Total Files
0
Language
English
Journal
Applied Physics A Solids and Surface
DOI
10.1007/bf00348134
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