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The last 5 uploaded publications
Investigation of plasma hydrogenation and trapping mechanism for layer transfer
Peng Chen, Paul Kim Ho Chu, T. Höchbauer, J. K. Lee, M. Nastasi, Dan Buca, S. Mantl, Roger Loo, Matty Caymax, T. L. Alford, J. W. Mayer, N. David Theodore, Ming Cai, Bernd Schmidt, S. S. Lau (2005). Investigation of plasma hydrogenation and trapping mechanism for layer transfer. , 86(3), DOI: https://doi.org/10.1063/1.1852087.
Article55 days agoSimulation of suppression of floating-body effect in partially depleted SOI MOSFET using a Si1−xGex dual source structure
Ming Zhu, Peng Chen, Ricky K.Y. Fu, Weili Liu, Chenglu Lin, Paul Kim Ho Chu (2004). Simulation of suppression of floating-body effect in partially depleted SOI MOSFET using a Si1−xGex dual source structure. , 114-115, DOI: https://doi.org/10.1016/j.mseb.2004.07.070.
Article55 days agoImplant damage and redistribution of indium in indium-implanted thin silicon-on-insulator
Peng Chen, Zhenghua An, Ming Zhu, Ricky K.Y. Fu, Paul Kim Ho Chu, Neil Montgomery, S. Biswas (2004). Implant damage and redistribution of indium in indium-implanted thin silicon-on-insulator. , 114-115, DOI: https://doi.org/10.1016/j.mseb.2004.07.031.
Article55 days agoFormation of silicon on plasma synthesized aluminum nitride structure by ion cutting
Ming Zhu, Peng Chen, Ricky K.Y. Fu, Weili Liu, Chenglu Lin, Paul Kim Ho Chu (2004). Formation of silicon on plasma synthesized aluminum nitride structure by ion cutting. , 22(6), DOI: https://doi.org/10.1116/1.1811629.
Article55 days agoFormation of silicon on plasma synthesized SiOxNy and reaction mechanism
Ming Zhu, Xuejie Shi, Peng Chen, Weili Liu, Man Wong, Chenglu Lin, Paul Kim Ho Chu (2004). Formation of silicon on plasma synthesized SiOxNy and reaction mechanism. , 243(1-4), DOI: https://doi.org/10.1016/j.apsusc.2004.09.056.
Article55 days ago