Peng Chen

AlN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application

Ming Zhu, Peng Chen, Ricky K.Y. Fu, Weili Liu, Chenglu Lin, Paul Kim Ho Chu (2004). AlN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application. , 239(3-4), DOI: https://doi.org/10.1016/j.apsusc.2004.05.287.