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Daan Hein Alsem, Hua Xiang, Robert O. Ritchie, K. Komvopoulos (2012). Sidewall Adhesion and Sliding Contact Behavior of Polycrystalline Silicon Microdevices Operated in High Vacuum. Journal of Microelectromechanical Systems, 21(2), pp. 359-369, DOI: 10.1109/jmems.2011.2180364.
