Ming Zhu

Formation of silicon on plasma synthesized SiOxNy and reaction mechanism

Ming Zhu, Xuejie Shi, Peng Chen, Weili Liu, Man Wong, Chenglu Lin, Paul Kim Ho Chu (2004). Formation of silicon on plasma synthesized SiOxNy and reaction mechanism. , 243(1-4), DOI: https://doi.org/10.1016/j.apsusc.2004.09.056.