Chun-Wen Kuo

Fabrication of Size-Tunable Large-Area Periodic Silicon Nanopillar Arrays with Sub-10-nm Resolution

Chun-Wen Kuo, Jau-Ye Shiu, Peilin Chen, Gabor Somorjai (2003). Fabrication of Size-Tunable Large-Area Periodic Silicon Nanopillar Arrays with Sub-10-nm Resolution. , 107(37), DOI: https://doi.org/10.1021/jp035468d.