Miao Zhang

XTEM study of Ni gettering to H-implantation-induced nanocavities in SIMOX

Miao Zhang, Weili Liu, Xinzhong Duo, Zhenghua An, Lin Chenglu, Paul Kim Ho Chu, R. Scholz (2003). XTEM study of Ni gettering to H-implantation-induced nanocavities in SIMOX. , DOI: https://doi.org/10.1109/iit.2000.924144.