R.W.Y. Poon

Evaporation–glow discharge hybrid source for plasma immersion ion implantation

L.H Li, Ricky K.Y. Fu, R.W.Y. Poon, Sunny Kwok, Paul Kim Ho Chu, Yulun Wu, Y.H Zhang, Xin Cai, Q.L Chen, Ming Xu (2004). Evaporation–glow discharge hybrid source for plasma immersion ion implantation. , 186(1-2), DOI: https://doi.org/10.1016/j.surfcoat.2004.04.025.