Shiqin Yang

Optical and mechanical properties of alumina films fabricated on Kapton polymer by plasma immersion ion implantation and deposition using different biases

Yongxian Huang, Xiubo Tian, Shiqin Yang, Ricky K.Y. Fu, Paul Kim Ho Chu (2007). Optical and mechanical properties of alumina films fabricated on Kapton polymer by plasma immersion ion implantation and deposition using different biases. , 253(24), DOI: https://doi.org/10.1016/j.apsusc.2007.06.011.