Stef Bal

Pattern Collapse of High-Aspect-Ratio Silicon Nanostructures - A Parametric Study

Nandi Vrancken, Guy Vereecke, Stef Bal, Stefanie Sergeant, Geert Doumen, Frank Holsteyns, Herman Terryn, Stefan De Gendt, XiuMei Xu (2016). Pattern Collapse of High-Aspect-Ratio Silicon Nanostructures - A Parametric Study. Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena, 255, pp. 136-140, DOI: 10.4028/www.scientific.net/ssp.255.136.