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  5. Use of in-situ spectroscopic ellipsometry to study aluminium/oxide surface modifications in chloride and sulfuric solutions

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Article
English
2004

Use of in-situ spectroscopic ellipsometry to study aluminium/oxide surface modifications in chloride and sulfuric solutions

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English
2004
Thin Solid Films
Vol 455-456
DOI: 10.1016/j.tsf.2004.01.038

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Herman Terryn
Herman Terryn

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Sake Van Gils
C. A. Melendres
Herman Terryn
+1 more

Abstract

In-situ visible spectroscopic ellipsometry (VISSE) is used to study the influence of 0.1 M HCl, pH 1.2 and H2SO4 with equal pH on electropolished Al with and without thicker barrier oxide film. A clear connection between VISSE results and open circuit potential (OCP) is shown: both techniques confirm the process of dissolution and regrowth of a new layer in-situ. For immersion of electropolished Al in both solutions, dissolution of the film corresponds to a decrease in OCP followed by an increase in thickness and OCP to reach a constant potential. For the electropolished Al film immersed in HCl also surface roughening occurs induced by the attack of Cl− ions. For immersion in H2SO4, the sample is less roughened as compared to immersion in HCl. In the case of a barrier oxide film on Al, only dissolution of the film is noted for both solutions.

How to cite this publication

Sake Van Gils, C. A. Melendres, Herman Terryn, Erik Stijns (2004). Use of in-situ spectroscopic ellipsometry to study aluminium/oxide surface modifications in chloride and sulfuric solutions. Thin Solid Films, 455-456, pp. 742-746, DOI: 10.1016/j.tsf.2004.01.038.

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Publication Details

Type

Article

Year

2004

Authors

4

Datasets

0

Total Files

0

Language

English

Journal

Thin Solid Films

DOI

10.1016/j.tsf.2004.01.038

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