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Get Free AccessWe demonstrate a bottom-up/top-down combined method for the fabrication of horizontally suspended, well-oriented and size-controlled Si nanowire arrays. Mechanical beamlike structures composed of multiple ordered arrays consecutively linked by transversal microspacers are obtained by this method. Such structures are used to investigate the mechanical elasticity of the nanowire arrays by atomic force microscopy. Our results point out important differences in the morphology and mechanical behavior of the fabricated nanowire-based structures with respect to equivalent bulk material structures.
Álvaro San Paulo, Noel Arellano, J.A. Plaza, Rongrui He, Carlo Carraro, Roya Maboudian, Roger T. Howe, Jeff Bokor, Peidong Yang (2007). Suspended Mechanical Structures Based on Elastic Silicon Nanowire Arrays. , 7(4), DOI: https://doi.org/10.1021/nl062877n.
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Type
Article
Year
2007
Authors
9
Datasets
0
Total Files
0
Language
en
DOI
https://doi.org/10.1021/nl062877n
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