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  5. On the morphology of Si/SiO2/Ni nanostructures with swift heavy ion tracks in silicon oxide

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Article
English
2014

On the morphology of Si/SiO2/Ni nanostructures with swift heavy ion tracks in silicon oxide

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English
2014
Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques
Vol 8 (4)
DOI: 10.1134/s1027451014040326

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Herman Terryn
Herman Terryn

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S. E. Demyanov
Egor Kaniukov
А.В. Петров
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Abstract

Si/SiO2/Ni nanostructures are fabricated by the irradiation of an oxidized Si surface with swift heavy ions, nanopore etching in the SiO2 layer, and the el

How to cite this publication

S. E. Demyanov, Egor Kaniukov, А.В. Петров, Е. К. Белоногов, Е.А. Streltsov, Д. К. Иванов, Yu. A. Ivanova, C. Trautmann, Herman Terryn, Manuela Petrova, Jon Ustarroz, Владимир Сиваков (2014). On the morphology of Si/SiO2/Ni nanostructures with swift heavy ion tracks in silicon oxide. Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques, 8(4), pp. 805-813, DOI: 10.1134/s1027451014040326.

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Publication Details

Type

Article

Year

2014

Authors

12

Datasets

0

Total Files

0

Language

English

Journal

Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques

DOI

10.1134/s1027451014040326

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