Mechanical elasticity of single and double clamped silicon nanobeams fabricated by the vapor-liquid-solid method

Atomic force microscopy has been used to characterize the mechanical elasticity of Si nanowires synthesized by the vapor-liquid-solid method. The nanowires are horizontally grown between the two facing Si(111) sidewalls of microtrenches prefabricated on a Si(110) substrate, resulting in suspended single and double clamped nanowire-in-trench structures. The deflection of the nanowires is induced and measured by the controlled application of normal forces with the microscope tip. The observed reversibility of the nanowire deflections and the agreement between the measured deflection profiles and the theoretical behavior of single and double clamped elastic beams demonstrate the overall beamlike mechanical behavior and the mechanical rigidity of the clamping ends of the nanowire-in-trench structures. These results demonstrate the potential of the nanowire-in-trench fabrication approach for the integration of VLS grown nanostructures into functional nanomechanical devices.