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  5. Investigation on Thin Film Lithium Microbatteries

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2004

Investigation on Thin Film Lithium Microbatteries

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en
2004
hdl.handle.net/1721.1/3831

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Gerbrand Ceder
Gerbrand Ceder

University of California, Berkeley

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Zhicong Shi
Lei‐Lei Lu
Gerbrand Ceder

Abstract

Thin film lithium microbatteries were investigated in this project in which LiCoO₂ cathodes about 200 to 500 nm were fabricated by pulsed-laser deposition (PLD) at different processing parameters such as laser energy and fluence, substrate temperature, background gas pressure, and target-substrate distance. Structure, microstructure and composition of as-deposited LiCoO₂ films were determined by XRD, SEM and XPS. Optimal deposition parameters were identified. Relaxation of open-circuit voltage of as-prepared cells and charge-discharge cycling were conducted to characterize the electrochemical properties of microbatteries made of these LiCoO₂ films.

How to cite this publication

Zhicong Shi, Lei‐Lei Lu, Gerbrand Ceder (2004). Investigation on Thin Film Lithium Microbatteries.

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Publication Details

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Article

Year

2004

Authors

3

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Language

en

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