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Get Free AccessIn this paper, we identify the Young's modulus and residual stress state of a free-standing thin aluminum membrane, used in MEMS radio-frequency (rf) s
Horacio D. Espinosa, Yong Zhu, M. Fischer, John W. Hutchinson (2003). An Experimental/Computational Approach to Identify Moduli and Residual Stress in MEMS Radio-Frequency Switches. Experimental Mechanics, 43(3), pp. 309-316, DOI: 10.1177/0014485103036024.
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Type
Article
Year
2003
Authors
4
Datasets
0
Total Files
0
Language
English
Journal
Experimental Mechanics
DOI
10.1177/0014485103036024
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