Zhitong Song

Formation of silicon-on-aluminum nitride using ion-cut and theoretical investigation of self-heating effects

Ming Zhu, Weili Liu, Zhitong Song, Ricky K.Y. Fu, Paul Kim Ho Chu, Chenglu Lin (2004). Formation of silicon-on-aluminum nitride using ion-cut and theoretical investigation of self-heating effects. , 59(4), DOI: https://doi.org/10.1016/j.matlet.2004.10.035.